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  • accessory
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  • KSC4501 Cylinder
    KSC4501 Cylinder
    product-model：DCS、STC……
    optional-certificate：TS、UN、TPED、DOT
    work-pressure：2.2MPa
    helium-leak-detection-rate：
    polishing-grade：
  • KSC900L Cylinder
    KSC900L Cylinder
    product-model：TEOS、STC、HCDS……
    optional-certificate：UN、TS
    work-pressure：0.1MPa
    helium-leak-detection-rate：
    polishing-grade：
  • KSC900L Fixed Storage Tank
    KSC900L Fixed Storage Tank
    product-model：Trifluorosilane
    optional-certificate：TS
    work-pressure：0.5 MPa @ 60°C
    helium-leak-detection-rate：≤1X10-7pa.m³/s
    polishing-grade：EP,Ra0.07-0.25um